File:10nm metal layer pattern shift through focus.png

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10nm_metal_layer_pattern_shift_through_focus.png ‎(669 × 245 pixels, file size: 10 KB, MIME type: image/png)

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Description Through focus rms pattern shift for different horizontal (H) and vertical (V) patterns, including tip-to-side (T2S) at different slit positions. The anchor half-pitch is 24 nm. Ref.: T. H. Coskun et al., Proc. SPIE 9048, 90480W (2014). Note: The EUV tool NXE3300 has NA of 0.33 and conventional illumination sigma of 0.9 (https://www.asml.com/products/systems/twinscan-nxe/twinscan-nxe3300b/en/s46772?dfp_product_id=842).
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Author Guiding light
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Original upload log[edit]

The original description page was here. All following user names refer to en.wikipedia.
Date/Time Dimensions User Comment
2017-07-09 18:30:46 669 × 245 Guiding light
2017-07-09 17:45:36 669 × 245 Guiding light
2017-07-09 13:26:36 669 × 245 Guiding light
2017-07-07 05:04:01 966 × 596 Guiding light Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]]

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Date/TimeThumbnailDimensionsUserComment
current02:19, 13 May 2018Thumbnail for version as of 02:19, 13 May 2018669 × 245 (10 KB)OgreBot (talk | contribs)(BOT): Reverting to most recent version before archival
02:19, 13 May 2018Thumbnail for version as of 02:19, 13 May 2018669 × 245 (9 KB)OgreBot (talk | contribs)(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2017-07-09 17:45:36 by Guiding light
02:19, 13 May 2018Thumbnail for version as of 02:19, 13 May 2018669 × 245 (9 KB)OgreBot (talk | contribs)(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2017-07-09 13:26:36 by Guiding light
02:19, 13 May 2018Thumbnail for version as of 02:19, 13 May 2018966 × 596 (321 KB)OgreBot (talk | contribs)(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2017-07-07 05:04:01 by Guiding light
21:32, 11 May 2018Thumbnail for version as of 21:32, 11 May 2018669 × 245 (10 KB)Willy1018 (talk | contribs)Transferred from en.wikipedia (MTC!) (1.1.0)

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