File:36 nm pitch 2-bar CD delta vs focus.png

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36_nm_pitch_2-bar_CD_delta_vs_focus.png ‎(481 × 288 pixels, file size: 8 KB, MIME type: image/png)

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Description A 36 nm pitch horizontal two-bar structure exhibits significant CD difference (between upper and lower bar as a function of focus. This has been attributed to the shadowing effect of the EUV illumination. Ref.: V. Philipsen et al., Proc. SPIE vol. 10143, 1014310 (2017).
Date
Source Excel
Author Guiding light
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2017-06-20 12:47:50 481 × 288 Guiding light Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]]

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current21:36, 11 May 2018Thumbnail for version as of 21:36, 11 May 2018481 × 288 (8 KB)Willy1018 (talk | contribs)Transferred from en.wikipedia (MTC!) (1.1.0)

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